Axis Pro FC

Full cover all electric system


【Axis Pro FC summary】

■Front crystal-clear cover for safety

■Handles 5μm-size object with precise motion
■Equipped with electric transfer stage
■Just moves PC mouse after attaching sample
■Precise sample transfer by program control
■User-friendliness setting (Angle fixing arm makes it easy to set up tool)

【Axis Pro FC set includes】

・Axis Pro Full Cover Main Body (Configuration changes depends on specification)
・LED illumination unit (Reflection and transmission)
・GigE Camera

・Dedicated PC (Windows 10 IoT Enterprise for Embedded 64bit)
・21.5 inch liquid crystal display (Full HD)
・Dedicated Controller (MC-104)

Accessories (Option)

  • ・Super fine pitch rotator – FIB lift out
  • ・Electric Microtweezer – 30μm size grasp / extraction
  • ・Electric rotary stage – Optimize the sample direction
  • ・2 axis electric rotary stage Optimize the sample direction and transfer postion such as grid, mesh
  • ・Mechanical stage – Optimize for adjust when scrape cut
  • ・Dark-field illumination – discriminate the micro scar and foreign substance
  • ・Diagonal illumination adapter – gurge sample / enhancement of contrast


Various application with Axis Pro FC and Microtools

Axis Pro applicable main analytical method

  • ・Fourier transform infrared spectrometer (FTIR)
  • ・Micro Fourier transform infrared spectrometer (μFTIR)
  • ・Laser Raman Spectroscopy (μRAMAN)
  • ・X-ray Diffraction (XRD)
  • ・Wavelength Dispersive X-ray Fluorescence (WDXRF)
  • ・Energy Dispersive X-ray Fluorescence (EDXRF)
  • ・Electron Probe Micro Analyzer (EPMA)
  • ・Gas Chromatography – Mass spectrometry(GC/MS)
  • ・Liquid Chromatography – Mass Spectrometry(LC-MS)
  • ・Fourier-Transform Nuclear Magnetic Resonance Spectrometry (FT-NMR)
  • ・Transmission Electron Microscope (TEM)
  • ・Scanning Electron Microscope (SEM)
  • ・Focused Ion Beam (FIB)
  • ・Scanning Probe Microscope (SPM)
  • ・Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)