Axis Pro FC

Full cover all electric systemCatalog and leaflet

Catalog and leaflet



  • Fully-covered All-in-one Micro-sampling Equipment
  • PC mouse-operated microscope-integrated electric micromanipulator system empowers seamless picking up and delivery of microscopic samples.
  • Used for various applications, including FT-IR microscopy of foreign substances, collection of FIB-processed TEM thin samples, and precise marking.

Axis Pro FC feature

  • Consistently sample ≥5μm objects with precision and ease
  • Efficient particle removal in cleanroom environments made possible
  • Fully covered and enhanced safety, operability, and precision
  • Once the sample is placed, execute the desired operation with a PC mouse
  • Standard-equipped: Motorized second stage for seamless sample transfer
  • Program-controlled error-free sample transfer
  • Built-in storage space for keeping accessories
  • Simplified setup with the use of angle-fixed arms.

Axis Pro FC set inclusion

  • Axis Pro FC main unit (configuration varies depending on specifications)
  • LED (reflective/transmissive) illumination device, Gigabit Ethernet (GigE) Camera
  • Dedicated PC (Windows 10 IoT Enterprise / Embedded 64bit)
  • 21.5″ LCD display (Full HD panel)
  • Dedicated MC-104 stage regulator

Accessories (Option)

  • High-precision Electric Rotator – FIB lift-out
  • Electric Microtweezers: Grasping/picking up & releasing objects of ~30μm
  • Rotational Electric Stage : Optimizing the sample orientation
  • Bi-axis Rotational Electric Stage : Coordinate orientation control of the sample and transfer location
  • Rotational Mechanical Stage : Ideal for fine adjustments during cutting and milling
  • Mechanical Bi-axis Sample Holder: Ideal for adjusting the sample parallelism
  • Darkfield illumination: For discerning fine scratches and foreign substances
  • Tilted Illumination Adapter: improves contrast, e.g. for undulating substances

Axis Pro applicable Main Analytical Method

  • TEM – Transmission Electron Microscopy
  • SEM – Scanning Electron Microscope
  • FIB – Focused Ion Beam
  • SPM – Scanning Probe Microscope
  • ToF-SIMS – Time-of-Flight Secondary Ion Mass Spectrometry
  • FTIR- Fourier-transform infrared spectroscopy
  • uFTIR – micro Fourier Transform Interferometer
  • Raman spectroscopy
  • uRaman – Raman Laser Spectrometer
  • XRD – X-Ray Diffraction
  • WDXRF –Wavelength Dispersive type X-Ray Fluorescence analysis
  • EDXRF – Energy Dispersive type X-Ray Fluorescence analysis
  • GC/MS – Gas Chromatography – Mass Spectrometry
  • LC/MS – Liquid Chromatography – Mass Spectrometry
  • EPMA – Electron Probe Micro Analyser
  • NMR – Nuclear Magnetic Resonance